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*THIN FILM DEPOSITION AND GROWTH PROCESSES BY IONIZED CLUSTER BEAMS

Author(s):
Publication title:
Clusters and cluster-assembled materials : symposium held November 26-30, 1990, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
206
Pub. Year:
1991
Page(from):
383
Page(to):
390
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990982 [1558990984]
Language:
English
Call no.:
M23500/206
Type:
Conference Proceedings

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