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FORMATION OF PALLADIUM SILICIDE AND GERMANIDE IN THE Pd/a-Si/Si, Pd/a-Ge/Si, AND Pd/a-GeSi/Si SYSTEMS DURING THERMAL TREATMENT

Author(s):
Edelman, F.
Cytermann, C.
Brener, R.
Eizenberg, M.
Weil, R.
Beyer, W.
1 more
Publication title:
Kinetics of phase transformations : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
205
Pub. Year:
1992
Page(from):
281
Page(to):
288
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990975 [1558990976]
Language:
English
Call no.:
M23500/205
Type:
Conference Proceedings

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