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KINETICS OF NiSi FORMATION BY SOLID STATE DIFFUSION IN Pt/NiCr/Si VIA GROWTH OF AN AMORPHOUS Cr-RICH BARRIER LAYER

Author(s):
Patnaik, B.K.
Lee, Ju Hyeon
Adams, D.
Rozgonyi, G.A.
Parikh, N.R.
Swanson, M.L.
Salih, A.S.M.
Balducci, P.
3 more
Publication title:
Kinetics of phase transformations : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
205
Pub. Year:
1992
Page(from):
275
Page(to):
280
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990975 [1558990976]
Language:
English
Call no.:
M23500/205
Type:
Conference Proceedings

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