EXCIMER LASER-INDUCED SURFACE ACTIVATION OF AlN FOR ELECTROLESS METAL DEPOSITION

EXCIMER LASER-INDUCED SURFACE ACTIVATION OF AlN FOR ELECTROLESS METAL DEPOSITION

Author(s):: Esrom, Hilmar
Publication title:: Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A.
Title of ser.:: Materials Research Society symposium proceedings
Ser. no.:: 204
Pub. Year:: 1991
Page(from):: 457
Page(to):: 466
Pages:: 10
Pub. info.:: Pittsburgh, Pa.: Materials Research Society
ISSN:: 02729172
ISBN:: 9781558990968 [1558990968]
Language:: English
Call no.:: M23500/204
Type:: Conference Proceedings

Details

TDL ID:	ZA00015688
Series ID:	PA00000011
Conf. info. (Name):	Symposium on chemical perspectives of microelectronic materials
Conf. info. (Number):	2nd
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1990.11.26-1990.11.28

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