Blank Cover Image

ORGANOMETALLIC CHEMICAL VAPOR DEPOSITION OF COPPER FROM A NEW ORGANOMETALLIC PRECURSOR

Author(s):
Publication title:
Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
204
Pub. Year:
1991
Page(from):
415
Page(to):
420
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990968 [1558990968]
Language:
English
Call no.:
M23500/204
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings CONSECUTIVE SELECTIVE CHEMICAL VAPOR DEPOSITION OF COPPER AND ALUMINUM FROM ORGANOMETALLIC PRECURSORS

Fine, Stephen M., Dyer, Paul N., Norman, John A.T.

Materials Research Society
7 Conference Proceedings Chemical Vapor Deposition of Copper From a Stabilized Precursor Using Liquid Coinjection

G. A. Peterson, T.R. omstead, P.M. Smith, M.F. Gonzales

Electrochemical Society
2 Conference Proceedings NEW PRECURSORS FOR THE ORGANOMETALLIC CHEMICAL VAPOR DEPOSITION OF ALUMINUM NITRIDE

Gladfelter, Wayne L., Boyd, David C., Hwang, Jen-Wei, Haasch, Richard T., Evans, John F., Ho, Kwok-Lun, Jensen, Klavs F.

Materials Research Society
8 Conference Proceedings CHEMICAL VAPOR DEPOSITION OF COPPER FROM AN ORGANOMETALLIC SOURCE

Beach, David B., Kane, William F., Legoues, Francoise K., Knors, Christopher J.

Materials Research Society
3 Conference Proceedings LASER ASSISTED CHEMICAL VAPOR DEPOSITION OF Cu FROM A NEW Cu ORGANOMETALLIC COMPLEX

Hans, Jaesung, Jensen, Klavs F., Norman, John A. T.

Materials Research Society
9 Conference Proceedings Silicon carbon nitride films as new materials obtained by plasma chemical vapor deposition from novel precursor

Smirnova,T.P., Shmakov,A.N., Badalian,A.M., Kaichev,V.V., Bukhtiyarov,V.I., Rachlin,V.I., Fomina,A.N.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings The Chemical Vapor Deposition of Al-Cu Films Utilizing Independent Aluminum and Copper Organometallic Sources in a Simultaneous Deposition

Healy, Matthew D., Norman, John A. T., Hochberg, Arthur K.

MRS - Materials Research Society
10 Conference Proceedings CHEMICAL VAPOR DEPOSITION OF COPPER FROM METAL-ORGANIC COPPER ( I ) PHOSPHINE COMPLEXES

Shin, H. -K., Hampden-Smith, M. J., Kodas, T. T., Duesler, E.. N., Farr, J. D., Paffett, M.

Materials Research Society
5 Conference Proceedings CHEHIAL VAPOR DEPOSITION OF CHROMIUM CARBIDE FROM ORGANOMETALLIC PRECURSORS

Rutherfold,N.M., Larson, C.E., Jackson, R.L.

Materials Research Society
11 Conference Proceedings SURFACE AND REACTOR EFFECTS ON SELECTIVE COPPER DEPOSITION FROM Cu(hfac)tmvs

Norman, John A.T., Roberts, David A., Hochberg, Arthur K.

Materials Research Society
6 Conference Proceedings CHEMICAL VAPOR DEPOSITION OF NIOBIUM CARBIRDE USING A NOVEL ORGANOMETALLIC PRECURSOR

Stupik, Paul D., Cheatham, Linda K., Graha, John J., Barron, Andrew R. Barron

Materials Research Society
12 Conference Proceedings Metal-organic chemical vapor deposition of metal oxides: From precursor synthesis to thin films

Belot, J. A., Wang, A., Edleman, N. L., Babcock, J. R., Metz, M. V., Marks, T. J., Markworth, P. R., Chang, R. P. H.

MRS-Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12