MOCVD OF GaN USING DIETHYLGALLIUMAZIDE AND AMMONIA

MOCVD OF GaN USING DIETHYLGALLIUMAZIDE AND AMMONIA

Author(s):

Publication title:

Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

204

Pub. Year:

1991

Page(from):

101

Page(to):

106

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990968 [1558990968]

Language:

English

Call no.:

M23500/204

Type:

Conference Proceedings

Details

TDL ID:	ZA00015688
Series ID:	PA00000011
Conf. info. (Name):	Symposium on chemical perspectives of microelectronic materials
Conf. info. (Number):	2nd
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1990.11.26-1990.11.28

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