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INFLUENCE OF SILICON SUBSTRATE ION IMPLANTATION ON THE SUBSEQUENT MICROSTRUCTURE EVOLUTION IN COBALT SILICIDE FILMS

Author(s):
Publication title:
Evolution of thin-film and surface microstructure : symposium held November 26-December 1, 1990, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
202
Pub. Year:
1991
Page(from):
259
Page(to):
264
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990944 [1558990941]
Language:
English
Call no.:
M23500/202
Type:
Conference Proceedings

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