Blank Cover Image

HIGH DOSE RATE OXYGEN IMPLANTATION FOR FORMATION OF SILICON-ON-INSULATOR STRUCTURES

Author(s):
Publication title:
Surface chemistry and beam-solid interactions : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
201
Pub. Year:
1991
Page(from):
259
Page(to):
264
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990074 [1558990070]
Language:
English
Call no.:
M23500/201
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings EFFECT OF OXYGEN IMPLANTATION CONDITIONS ON BURIED SiO2 LAYER FORMATION USING A MULTIPLE STEP PROCESS

Namavar, F., Cortesi, E., Pinizzotto, R.F., Yang, H.

Materials Research Society
7 Conference Proceedings ON THE FORMATION OF LTHICK AND MULTIPLE LAYER SIMOX STRUCTURE AND THEIR APPLICATIONS

Namavar, F., Cortesi, E., Soref, R. A., Sioshansi, P.

Materials Research Society
2 Conference Proceedings THE MICROSTRUCTURE OF SILICON-ON-INSULATOR STRUCTURES FORMED BY HIGH DOSE OXYGEN ION IMPLANTATION

Pinizzotto, R. F., Vaandrager, B. L., Lam, H. W.

North-Holland
8 Conference Proceedings SILICIDE FORMATION BY HIGH DOSE TRANSITION METAL IMPLANTS INTO Si

Sanchez, F.H., Namavar, F., Budnick, J.I., Fasihudin, A., Hayden, H.C.

Materials Research Society
3 Conference Proceedings LOW-DEFECT, HIGH-QUALITY SIMOX PRODUCED BY MULTIPLE OXYGEN IMPLANTATION WITH SUBSTOICHIOMETRIC TOTAL DOSE

Namavar, F., Cortesi, E., Sioshansi, P.

Materials Research Society
9 Conference Proceedings ION CHANNELING MEASUREMENTS ON GERMANIUM IMPLANTED AND ANNEALED SILICON

Johnson, E.A., Namavar, F., Cortesi, E., Culbertson, R.J.

Materials Research Society
4 Conference Proceedings STRAIN RELIEF AND DEFECT FORMATION IN HIGH DOSE OXYGEN IMPLANTED SILICON

Venables, D., Jones, K. S., Namavar, F., Manke, J. M.

Materials Research Society
10 Conference Proceedings SILICON NANOSTRUCTURES IN Si-BASED LIGHT-EMITTING DEVICES

Namavar, Fereydoon, Pinizzotto, R.F., Yang, H., Kalkhoran, N., Maruska, P.

Materials Research Society
5 Conference Proceedings SILICIDE FORMATION IN HIGH-DOSE Fe-IMPLANTED SILICON

Tan, Z., Namavar, F., Heald, S.M., Budnick, J. I., Sanchez, F. H.

Materials Research Society
11 Conference Proceedings A REVIEW OF SILICON-ON-INSULATOR FORMATION BY OXYGEN ION IMPLANTATION*

Pinizzitto, R. F.

North-Holland
6 Conference Proceedings FORMATION OP BURIED Si02 BY HIGH DOSE IMPLANTATION OF OXYGEN AT RODM AND LIQUID NITROGEN TEMPERATURES

Namavar, F., Budnick, J.I., Sanchez, F.H., Hayden, H.C.

Materials Research Society
12 Conference Proceedings SILICON ON INSULATOR BY HIGH DOSE IMPLANTATION

Hemment, P. L. F.

North Holland
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12