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STRATIFIED ION DAMAGE AND IN SITU REGROWTH IN GaAs/AlAs HETEROSTRUCTURES

Author(s):
Cullis, A.G.
Eaglesham, D.J.
Jacobson, D.C.
Poate, J.M.
Whitehouse, C.R.
Smith, P.W.
1 more
Publication title:
Surface chemistry and beam-solid interactions : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
201
Pub. Year:
1991
Page(from):
221
Page(to):
228
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990074 [1558990070]
Language:
English
Call no.:
M23500/201
Type:
Conference Proceedings

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