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MESO-EPITAXY: EPITAXIAL GROWTH OF SILICON OVER BURIED SINGLE CRYSTAL CoSi2 LAYERS

Author(s):
Publication title:
Epitaxial heterostructures : symposium held April 16-19, 1990, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
198
Pub. Year:
1990
Page(from):
567
Page(to):
576
Pages:
10
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990876 [1558990879]
Language:
English
Call no.:
M23500/198
Type:
Conference Proceedings

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