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HYDROGEN INCORPORATION IN AMORPHOUS SILICON PREPARED AT HIGH DEPOSITION RATES BY THE VHF-GD TECHNIQUE

Author(s):
Finger, F.
Viret, V.
Shah, A.
Tang, X.-M.
Weber, J.
Beyer, W.
1 more
Publication title:
Amorphous silicon technology, 1990 : symposium held April 17-20, 1990, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
192
Pub. Year:
1990
Page(from):
583
Page(to):
588
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990814 [155899081X]
Language:
English
Call no.:
M23500/192
Type:
Conference Proceedings

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