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FLUORINATED SILICON NITRIDE (A-Si:N,F,H) FILMS USING NF3 FOR AMORPHOUS SILICON BASED SOLAR CELLS

Author(s):
Goh, F. H., C.
Tan, S. M.
Ng, K.
Naseem, H. A.
Brown,. W. D.
Hermann, A. M
1 more
Publication title:
Amorphous silicon technology, 1990 : symposium held April 17-20, 1990, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
192
Pub. Year:
1990
Page(from):
75
Page(to):
80
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990814 [155899081X]
Language:
English
Call no.:
M23500/192
Type:
Conference Proceedings

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