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THE ASPECTS OF THERMAL ANNEAL TO INTRINSIC STRESS AND MICROSTRUCTURE OF MULTILAYER THIN FILMS

Author(s):
Publication title:
Interfaces between polymers, metals, and ceramics : symposium held April 25-27, 1989, San Diego, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
153
Pub. Year:
1989
Page(from):
291
Page(to):
298
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990265 [1558990267]
Language:
English
Call no.:
M23500/153
Type:
Conference Proceedings

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