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PLASMA ETCHING OF InP AND RELATED MATERIALS IN ELECTRON CYCLOTRON RESONANCE CH4/H2/Ar DISCHARGES

Author(s):
Pearton, S. J.
Chakrabarti, U. K.
Kinsell, A. P.
Emerson, A. B.
Johnson., D.
Constantine, C.
1 more
Publication title:
Plasma processing and synthesis of materials III : symposium held April 17-19, 1990, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
190
Pub. date:
1991
Page(from):
297
Page(to):
302
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990791 [1558990798]
Language:
English
Call no.:
M23500/190
Type:
Conference Proceedings

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