Blank Cover Image

INVESTIGATION OF TEXTURE AND STRESS IN UNDOPED POLYSILICON FILMS

Author(s):
Publication title:
Polysilicon thin films and interfaces
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
182
Pub. Year:
1990
Page(from):
201
Page(to):
206
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990715 [1558990712]
Language:
English
Call no.:
M23500/182
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings LPCVD POLYCRYSTALLINE SILICON THIN FILMS: THE EVOLUTION OF STRUCTURE, TEXTURE AND STRESS

Krulevitch, R., Nguyen, Tai D., Johnson, G.C., Howe, R.T., Wenk, H.R., Gronsky, R.

Materials Research Society
7 Conference Proceedings New Opportunities in the Texture and Stress Field by the Whole Pattern Analysis

Ferrari,M., Lutterotti,L., Matthies,S., Polonioli,P., Wenk,H.-R.

Trans Tech Publications
2 Conference Proceedings STRESS AND MICROSTRUCTURE IN LPCVD POLYCRYSTALLINE SILICON FILMS: EXPERIMENTAL RESULTS AND CLOSED FORM MODELING OF STRESSES

Krulevitch, P., Johnson, G. C., Howe, R. T.

Materials Research Society
8 Conference Proceedings Effect of polysilicon interface on stress in multistacked polysilicon films

Choi,C.-A., Lee,C.-S., jang,W.-1., Lee,J.-H., Shon,B.K.

SPIE - The International Society for Optical Engineering
3 Conference Proceedings STRESS-CORROSION CRACKING AND BLISTERING OF THIN POLYCRYSTALLINE SILICON FILMS IN HYDROFLUORIC ACID

Monk, D. J., Krulevitch, P., Howe, R. T., Johnson, G. C.

MRS - Materials Research Society
9 Conference Proceedings Fracture Strength of Polycrystalline Silicon

Jones, P. T., Johnson, G. C., Howe, R. T.

MRS - Materials Research Society
4 Conference Proceedings STRESS AND MICROSTRUCTURE IN PHOSPHORUS DOPED POLYCRYSTALLINE SILICON

Krulevitch, P., Johnson, G.C., Howe, R.T.

Materials Research Society
10 Conference Proceedings THE INTERFACE STRUCTURE OF GRAIN BOUNDARIES IN POLYSILICON

Johnson, S. M., Yoo, K. C., Lin, H. C., Rosemeier, R. G., Soltani, P.

North-Holland
5 Conference Proceedings *APPLICATIONS OF POLYSILICON FILMS IN MICROSENSORS AND MICROACTUATORS

Howe, R. T.

Materials Research Society
11 Conference Proceedings Laser Crystallized Polysilicon Thin Films and Applications

Boyce, J. B., Mei, P., Fork, D. K., Anderson, G. B., Johnson, R. I.

MRS - Materials Research Society
6 Conference Proceedings *CHARACTERIZATION OF THIN FILMS USING MICROMECHANICAL STRUCTURES

Pratt, R.I., Johnson, G.C., Howe, R.T., Nikkel, Jr., D.J.

Materials Research Society
12 Conference Proceedings Quantitative Texture Analysis with the HIPPO TOF Diffractometer

Pehl, J., Matthies, S., Wenk, H. R., Lutterotti, L., Vogel, S. C.

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12