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INTERFACE MORPHOLOGY, NUCLEATION AND ISLAND FORMATION OF TiSi2 ON Si(111)

Author(s):
Jeon, Hyeongtag
Sukow, C. A.
Honeycutt, J. W.
Humphreys, T. P.
Nemanich, R. J.
Rozgonyi, G. A.
1 more
Publication title:
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
181
Pub. Year:
1990
Page(from):
559
Page(to):
564
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990708 [1558990704]
Language:
English
Call no.:
M23500/181
Type:
Conference Proceedings

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