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METAL SURFACE MORPHOLOGY CHARACTERIZATION USING LASER SCATTEROMETRY

Author(s):
Gaspar, S. M.
Hickman, K. C.
McNeil, J. R.
Jacobson, R. D.
Lindauer, G. P.
Strausser, Y. E.
Krosche, E. R.
2 more
Publication title:
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
181
Pub. Year:
1990
Page(from):
541
Page(to):
544
Pages:
4
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990708 [1558990704]
Language:
English
Call no.:
M23500/181
Type:
Conference Proceedings

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