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*INTERFACIAL MICROSTRUCTURE AND CARRIER CONDUCTION PROCESS IN Pt/Ti OHMIC CONTACT TO p-In0.53Ga0.47As FORMED BY RAPID THERMAL PROCESSING

Author(s):
Chu, S. N. G.
Katz, A.
Boone, T.
Thomas, P. M.
Riggs, V. G.
Dautremont-Smith, W. C.
Johnson Jr., W. D.
2 more
Publication title:
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
181
Pub. date:
1990
Page(from):
389
Page(to):
400
Pages:
12
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990708 [1558990704]
Language:
English
Call no.:
M23500/181
Type:
Conference Proceedings

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