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A TWO-STEP PROCESS FOR THE FORMATION OF Au-Ge OHMIC CONTACTS TO n-GaAs

Author(s):
Dornath-Mohr, M. A.
Cole, M. W.
Lee, H. S.
Wrenn, C. S.
Eckart, D. W.
Fox, D. C.
Yerke, Fox L.
Chang, H. W.
lareau, R. T.
Jones, K. A.
Cosandy, F.
6 more
Publication title:
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
181
Pub. date:
1990
Page(from):
369
Page(to):
374
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990708 [1558990704]
Language:
English
Call no.:
M23500/181
Type:
Conference Proceedings

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