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*THERMALLY STABLE, LOW RESISTANCE INDIUM-BASED OHMIC CONTACTS TO n AND p-TYPE GaAs

Author(s):
Murakami, Masanori
Hallali, P. -E.
Price, W> H.
Norcott, M.
Lustig, N.
Kim, H. -J.
Wright, S. L.
LaTulipe, D.
3 more
Publication title:
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
181
Pub. date:
1990
Page(from):
233
Page(to):
242
Pages:
10
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990708 [1558990704]
Language:
English
Call no.:
M23500/181
Type:
Conference Proceedings

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