*APPLICATIONS OF AMORPHOUS Ti-P-N DIFFUSION BARRIERS IN SILICON METALLIZATION
- Author(s):
- Publication title:
- Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 181
- Pub. Year:
- 1990
- Page(from):
- 33
- Page(to):
- 40
- Pages:
- 8
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558990708 [1558990704]
- Language:
- English
- Call no.:
- M23500/181
- Type:
- Conference Proceedings
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