MICROSTRUCTURE AND KINETICS OF THE INTERFACE REACTION BETWEEN TITANIUM THIN FILMS AND (112) SAPPHIRE SUBSTRATES

MICROSTRUCTURE AND KINETICS OF THE INTERFACE REACTION BETWEEN TITANIUM THIN FILMS AND (112) SAPPHIRE SUBSTRATES

Author(s):

Publication title:

Advanced electronic packaging materials : symposium held November 27-29, 1989, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

167

Pub. Year:

1990

Page(from):

335

Page(to):

340

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990555 [1558990550]

Language:

English

Call no.:

M23500/167

Type:

Conference Proceedings

Details

TDL ID:	ZA00015651
Series ID:	PA00000011
Conf. info. (Name):	Symposium on advanced electronic packaging materials
Conf. info. (Number):	1989
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1989.11.27-1989.1129

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