Blank Cover Image

*THE PLASMA DEPOSITION OF SEMICONDUCTOR MULTILAYER STRUCTURES

Author(s):
Publication title:
Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
165
Pub. date:
1990
Page(from):
199
Page(to):
208
Pages:
10
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990531 [1558990534]
Language:
English
Call no.:
M23500/165
Type:
Conference Proceedings

Similar Items:

Xu, Jun, Chen, Kunji, Feng, Duan, Miyazaki, Seiichi, Hirose, Masataka

MRS - Materials Research Society

Nakagawa, K., Fukuda, M., Miyazaki, S., Hirose, M.

MRS - Materials Research Society

Hirose, Masataka, Murayama, Naoki, Miyazaki, Seiichi, Ihara, Yohji

Materials Research Society

Takakura, M., Yasaka, T., Miyazaki, S., Hirose, M.

Materials Research Society

Miyazaki, Seiichi, Shibaguchi, Taku, Ikeda, Mitsuhisa

Materials Research Society

Seiichi Tanaka, Hiroshi Tsukamoto, Koji Miyazaki

American Society of Mechanical Engineers

Hirotaka Kaku, Seiichiro Higashi, Tatsuya Okada, Hideki Murakami, Seiichi Miyazaki

Materials Research Society

Hirose,M.

Trans Tech Publications

Miyazaki, Seiichi, Yamashita, Hiroki, Nakagawa, Hiroshi, Yamaoka, Masanori

Materials Research Society

Osada, T., Kawazawa, Y., Miyazaki, S., Hirose, M.

MRS - Materials Research Society

Miyazaki, S., Shin, H., Okamoto, K., Hirose, M.

Materials Research Society

Shiba, K., Miyazaki, S., Hirose, M.

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12