THE STUDY OF CONTAMINATION OF CARBON, BORON, AND OXYGEN IN LEC-GaAs

THE STUDY OF CONTAMINATION OF CARBON, BORON, AND OXYGEN IN LEC-GaAs

Author(s):

Publication title:

Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

163

Pub. Year:

1990

Page(from):

1001

Page(to):

1006

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990517 [1558990518]

Language:

English

Call no.:

M23500/163

Type:

Conference Proceedings

Details

TDL ID:	ZA00015647
Series ID:	PA00000011
Conf. info. (Name):	Symposium on impurities, defects, and diffusion in semiconductors
Conf. info. (Number):	1989
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1989.11.27-1989.12.01

Similar Items:

1 Conference Proceedings Carbon in LEC Grown GaAs Crystals Otoki,Y., Sahara,M., Shinzawa,S., Kuma,S. Trans Tech Publications	7 Conference Proceedings Effects of Activation Annealing on Thermally Stimulated Current in Semi-Insulating LEC GaAs Substrates Yoshida,H., Kiyama,M., Takebe,T., Yamashita,M., Fujita,K. Trans Tech Publications
2 Conference Proceedings Annealing Studies on LEC Grown SI Undoped GaAs Single Crystals Durai,L., Radhakrishnan,J.K., Thirumavalavan,M., Inderpal, Harminder Singh, Darshan Singh, Jagdish Chander, Jitender … Narosa Publishing House	8 Conference Proceedings Use of molecular oxygen to reduce EUV-induced carbon contamination of optics Malinowski,M.E., Grunow,P., Steinhaus,C., Clift,W.M., Klebanoff,L.E. SPIE-The International Society for Optical Engineering
3 Conference Proceedings COMPARATIVE OPTICAL STUDIES OF Cu, Mn, AND C IMPURITIES IN BULK LEC GROWN GaAs BY ELECTRON BEAM ELECTROREFLECTANCE (EBER) AND PHOTOLUMINESCENCE (PL) Herman, M.H., Pearah, P.J., Elcess, K., Ward, I.D. Materials Research Society	9 Conference Proceedings A STUDY OF BORON IMPLANTED SILICON Chang, P.-H., Liu, H., -Y., Anthony, J. M. Materials Research Society
4 Conference Proceedings UNDOPED LEC GaAs AS AN INFRARED BOLOMETER DETECTOR Estill, S., Brozel, M.R. Materials Research Society	10 Conference Proceedings Chemical Vapor Deposition of Turbostratic and Hexagonal Boron Nitride Sugiyama,K., Itoh,H. Trans Tech Publications
5 Conference Proceedings In Situ High Resolution Transmission Electron Microscopy Studies of High Temperature Behavior of Surface Al₂O₃ Thin Layer on an AlN … H. Fukushima, M. Azuma, Y. Kanechika Trans Tech Publications	11 Conference Proceedings EFFECTS OF RAPID THERMAL ANNEALS ON BORON IMPLANTED GaAs Bowman Jr., R. C., Adams, P. M., Herman, M. H., Buttrill Jr., S. E. Materials Research Society
6 Conference Proceedings Defects in neutron-irradiated LEC semi-insulating-GaAs Jones,B.K., Santana,J.M., Sloan,T. Trans Tech Publications	12 Conference Proceedings Characterization and Engineering of the Sb Hetero-antisite Defect in LEC Grown GaAs Wilson, M. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12