Blank Cover Image

RAPID THERMAL PROCESS-INDUCED DEFECTS: GETTERING OF INTERNAL CONTAMINANTS

Author(s):
Publication title:
Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
163
Pub. Year:
1990
Page(from):
915
Page(to):
918
Pages:
4
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990517 [1558990518]
Language:
English
Call no.:
M23500/163
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings PHOSPHORUS GETTERING BY RAPID THERMAL PROCESSING

Hartiti, Bouchaib, Slaoui, Abdelilah, Muller, Jean-Claude, Siffeert, Paul

Materials Research Society
7 Conference Proceedings RAPID THERMAL OXIDATION OF HEAVILY DOPED SILICON

Slaoui, A., Hartiti, B., Busch, M. C., Muller, J. C., Siffert, P.

Materials Research Society
2 Conference Proceedings RAPID THERMAL ANNEALING OF SPIN-ON GLASS FILMS

Ventura, Laurent, Hartiti, Bouchaib, Slaoui, Abdelilah, Muller, Jean-Claude, Siffert, Paul

Materials Research Society
8 Conference Proceedings SHALLOW-JUNCTION FORMATION BY RAPID THERMAL DIFFUSION INTO SILICON FROM DOPED SPIN-ON GLASS FILMS

Ventura, L., Slaoui, A., Hartiti, B., Muller, J. C., Stuck, R., Siffert, P.

MRS - Materials Research Society
3 Conference Proceedings PHOSPHORUS GLASS DOPING OF POLYCRYSTALLINE SILICON DURING RAPID THERMAL ANNEALING

Hartiti, Bouchaib, Slaoui, Abdelilah, Stuck, Roland, Muller, Jean-Claude, Siffert, Paul

Materials Research Society
9 Conference Proceedings TEMPERATURE CONTROL AND UNIFORMITY DURING RAPID THERMAL SILICIDATION

Eichhammer, Wolfgang, Vandernabeele, Peter, Maex, Karen

Materials Research Society
4 Conference Proceedings THERMAL STABILITY OF HYDROGENATION PROCESSES INTO MULTICRYSTALLINE SILICON

Mulfer, Jean-Claude, Hartiti, Bouchaib, Younis, Hussain, Siffert, Paul

Materials Research Society
10 Conference Proceedings INFLUENCE OF RAPID THERMAL PROCESSING ON MINORITY CARRIER DIFFUSION LENGTH IN SILICON

Eichammer, Wolfgang A., Vu, Thuong-Quat, Siffert, P.

Materials Research Society
5 Conference Proceedings ANNEALING KINETICS DURING RAPID AND CLASSICAL THERMAL PROCESSING OF LASER AND IMPLANTATION INDUCED DEFECTS IN SILICON

Adekoya, W.O., Muller, J.C., Siffert, P.

Materials Research Society
11 Conference Proceedings Classical and Rapid Thermal Process Effects on Oxygen and Carbon Precipitation in Silicon

Mahfoud, K., Loghmarti, M., Muller, J. C., Siffert, P.

MRS - Materials Research Society
6 Conference Proceedings Influence of Oxygen on Rapid Thermal Co-Diffusion of Phosphorus and Aluminium in Silicon

Mahfoud, K., Hartiti, B., Muller, J. C., Siffert, P.

MRS - Materials Research Society
12 Conference Proceedings Rapid Thermal Dopants Diffusion and Surface Passivation for Silicon Solar Cells Applications

Slaoui, Abdelilah, Lachiq, Aziz, Ventura, Laurent, Muller, Jean Claude

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12