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REGROWTH OF DAMAGED LAYERS IN DIAMOND PRODUCED BY ION IMPLANTATION

Author(s):
Sandhu, G.S.
Liu, B.
Parikh, N.R.
Hunn, J.D.
Swanson, M.L.
Wichert, Th.
Deicher, M.
Skudlik, H.
Lennard, W.N.
Mitchell, I.V.
5 more
Publication title:
Diamond, silicon carbide, and related wide bandgap semiconductors : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
162
Pub. date:
1990
Page(from):
189
Page(to):
194
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990500 [155899050X]
Language:
English
Call no.:
M23500/162
Type:
Conference Proceedings

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