Blank Cover Image

REGROWTH OF DAMAGED LAYERS IN DIAMOND PRODUCED BY ION IMPLANTATION

Author(s):
Sandhu, G.S.
Liu, B.
Parikh, N.R.
Hunn, J.D.
Swanson, M.L.
Wichert, Th.
Deicher, M.
Skudlik, H.
Lennard, W.N.
Mitchell, I.V.
5 more
Publication title:
Diamond, silicon carbide, and related wide bandgap semiconductors : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
162
Pub. Year:
1990
Page(from):
189
Page(to):
194
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990500 [155899050X]
Language:
English
Call no.:
M23500/162
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings ION IMPLANTATION OF BORON IN DIAMOND

Sandhu, G.S., Swanson, M.L., Chu, W.K.

Materials Research Society
7 Conference Proceedings Thermal Stability of Acceptor-Hydrogen Pairs in Silicon

Deicher,M., Grtibel,G., Keller,R., Recknagel,E., Schulz,N., Skudlik,H., Wichert,Th.

Trans Tech Publications
2 Conference Proceedings STRUCTURAL DEFECTS IN ION-IMPLANTED SILICON OBSERVED BY PERTURBED ANGULAR CORRELATION.

DEICHER,M., GRUBEL,G., RECKNAGEL,E., WICHERT,Th.

Trans Tech Publications
8 Conference Proceedings RBS/CHANNELING AND TEN ANALYSIS OF THIN SANDWICHED EPI-LAYERS OF GERMANIUM ON SILICON

Swanson, M.L., Parikh, N.P., Frey, E.C., Sandhu, G.S., Chu, W.K., Baribeau, J.-M., Song, Kechang, McCaffrey, J., …

Materials Research Society
3 Conference Proceedings ACCUMULATION OF IMPLANTATION DAMAGE IN MeV IMPLANTED DIAMOND CRYSTALS

Hunn, John D., Withrow, S. P., Clausing, R. E., Heatherly, L., Bentley, J., Hembree, D. M., Jr., Parikh, N. R.

MRS - Materials Research Society
9 Conference Proceedings LOCALIZATION OF HYDROGEN IN B AND In DOPED SILICON BY ION CHANNELING AND PAC

Wichert, Th., Skudlik, H., Carstanjen, H. -D., Enders, T., Deicher, M., Grubel, G., Keller, R., Song, L., Stutzmann, M.

Materials Research Society
4 Conference Proceedings DOING OF DIAMOND OF CO-IMPLANTATION WITH DOPANT ATOMS AND CARBON

Sandhu, G.S., Kao, C.T., Swanson, M.L., Chu, W.K.

Materials Research Society
10 Conference Proceedings *FORMATION OF In-Cu PAIRS IN SILICON DURING CHEMOMECHANICAL POLISHING

Wichert, Th., Keller, R., Deicher, M., Pfeiffer, W., Skudlik, H., Steiner, D.

Materials Research Society
5 Conference Proceedings Formation of a Buried Soft Layer in SiC for "Compliant Substrate" by Ion Implantation

Lioubtchenko, M., Hunn, J., Suvkhanov, A., Parikh, N., Bray, D.

MRS - Materials Research Society
11 Conference Proceedings ION BEAM ANALYSIS OF O, N, AND B COMPOSITIONS IN MATERIALS USING NON-RUTHERFORD SCATTERING OF PROTONS

Parikh, N.R., Zhang, Z.H., Swanson, M.L., Yu, N., Chu, W.K.

Materials Research Society
6 Conference Proceedings Perturbed Angular Correlation Spectroscopy of In-Li Pairs in Silicon

Deicher,M., Grubel,G., Keller,R., Recknagel,E., Schulz,N., Skudlik,H., Wichert,Th.

Trans Tech Publications
12 Conference Proceedings GROWTH AND CHARACTERIZATION OF HETEROEPITAXIAL NICKEL FILMS ON DIAMOND SUBSTRATES

Humphreys, T.P., Jeon, Hyeongtag, Nemanich, R.J., Posthill, J.B., Rudder, R.A., Malta, D.P., Hudson, G.C., Markunas, …

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12