NOVEL STACKED CMOS PROCESS BY LOCAL OVERGROWTH

NOVEL STACKED CMOS PROCESS BY LOCAL OVERGROWTH

Author(s):

Publication title:

In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

158

Pub. Year:

1990

Page(from):

365

Page(to):

370

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990463 [1558990461]

Language:

English

Call no.:

M23500/158

Type:

Conference Proceedings

Details

TDL ID:	ZA00015642
Series ID:	PA00000011
Conf. info. (Name):	Symposium on in-situ patterning
Conf. info. (Number):	1989
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1989.11.29-1989.12.01

Similar Items:

1 Conference Proceedings 3-D Silicon-on-Insulator (SQl) Technologies Using Epitaxial Lateral Overgrowth (ELO) (Invited) Neudeck, G.W. Electrochemical Society	7 Conference Proceedings WARNING: LOCAL CORRELATION TRACKING MAY BE DANGEROUS TO YOUR (SCIENTIFIC) HEALTH Simon, G.W. ESA Publications Division
2 Conference Proceedings Single-crystal silicon beams formed by merged epitaxial lateral overgrowth (MELO) for optical reflectors G.W. Neudeck, A.E. Kabir Society of Photo-optical Instrumentation Engineers	8 Conference Proceedings SiC-Based Schottky Diode Gas Sensors Hunter,G.W., Neudeck,P.G., Chen,L.-Y., Knight,D., Li,C.C., Wu,Q.H. Trans Tech Publications
3 Conference Proceedings SiC-Based Gas Sensors Chen, L.-Y., Hunter, G.W., Neudeck, P.G. Electrochemical Society	9 Conference Proceedings Prospect of High-k/Metal Gate Stack Technology for Future CMOS Devices B. H. Lee, P. Kirsch, P. Majhi, S. Song, R. Chol, N. Moumen, G. Bersuker Electrochemical Society
4 Conference Proceedings High-performance TSI process for e-beam using vapor-applied crosslinking silylating agents Irmscher,M., Hofflinger,B., Springer,R., Stauffer,C., Peterson,W. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Development of SIC Gas Sensor Systems* Hunter, G.W., Neudeck, P.G., Okojie, R.S., Beheim, G.M, Thomas, V., Chen, L., Lukco, D., Liu, C.C., Ward, B., Makel, D. Electrochemical Society
5 Conference Proceedings Single Crystal Silicon Cantilever Beams and Microstructures Formed by Epitaxial Lateral Overgrowth Kabir, Abul E., Neudeck, Gerold W. Electrochemical Society	11 Conference Proceedings Selective Epitaxial Growth of SiGe Films in LPCVD Reactor Systems- Characterization of SiGe Films by Ellipsometry Lee, I.M., Wang, W.C., Koh, M.T.K., Denton, J.P., Takoudis, C.G., Kram, E.P., Neudeck, G.W. Electrochemical Society
6 Conference Proceedings Development of SiC-Based Gas Sensors for Aerospace Applications Hunter, G.W., Neudeck, P.G., Xu, J., Lukco, D., Trunek, A., Artale, M., Lampard, P., Androjna, D., Makel, D., Ward, B., … Materials Research Society	12 Conference Proceedings Breakdown Degradation Associated With Elementary Screw Dislocations in 4H-SiC p+n Junction Rectifiers Neudeck, P. G., Huang, W., Dudley, M. MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12