THE INTERACTION OF LASER GENERATED METHYL RADICALS WITH Cd, Te, AND CdTe SURFACES

THE INTERACTION OF LASER GENERATED METHYL RADICALS WITH Cd, Te, AND CdTe SURFACES

Author(s):

Publication title:

In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

158

Pub. Year:

1990

Page(from):

289

Page(to):

294

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990463 [1558990461]

Language:

English

Call no.:

M23500/158

Type:

Conference Proceedings

Details

TDL ID:	ZA00015642
Series ID:	PA00000011
Conf. info. (Name):	Symposium on in-situ patterning
Conf. info. (Number):	1989
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1989.11.29-1989.12.01

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