VISIBLE-WAVELENGTH LASER PHOTODEPOSITION OF COBALT INTERCONNECTS
- Author(s):
Rothschild, M. Sedlacek, J.H.C. Shaver, D.C. Ehrlich, D.J. Bittenson, S.N. Edwards, Jr., D. Economou, N.P. - Publication title:
- In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 158
- Pub. Year:
- 1990
- Page(from):
- 79
- Page(to):
- 84
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558990463 [1558990461]
- Language:
- English
- Call no.:
- M23500/158
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
GaAs CIRCUIT RESTRUCTURING BY MULTI-LEVEL LASER-DIRECT-WRITTEN TUNGSTEN PROCESS
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
8
Conference Proceedings
Long-term 193-nm laser-induced degradation of fused silica and calcium fluoride
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
North-Holland |
4
Conference Proceedings
Accelerated damage to blank and antireflectance-coated CaF2 surfaces under 157-nm laser irradiation
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Contamination rates of optical surfaces at 157 nm: impurities outgassed from construction materials and from photoresists
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Contamination rates of optical surfaces at 157 nm in the presence of hydrocarbon impurities
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
Long-term 193-nm laser irradiation of thin-film-coated CaF2 in the presence of H2O
SPIE - The International Society of Optical Engineering |
12
Conference Proceedings
Behavior of candidate organic pellicle materials under 157-nm laser irradiation
SPIE-The International Society for Optical Engineering |