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ION IMPLANTATION INDUCED EFFECTS AT POLYSILICON GATE FEATURE EDGES

Author(s):
Publication title:
Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
157
Pub. date:
1990
Page(from):
733
Page(to):
738
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990456 [1558990453]
Language:
English
Call no.:
M23500/157
Type:
Conference Proceedings

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