DOPANT SITE LOCATION IN DUAL-IMPLANTED GaP USING {111} PLANAR CHANNELING

DOPANT SITE LOCATION IN DUAL-IMPLANTED GaP USING {111} PLANAR CHANNELING

Author(s):

Parikh, N.R.

Venkatasubramanian, R.

Timmons, M.

3 more

Publication title:

Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

157

Pub. Year:

1990

Page(from):

671

Page(to):

676

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990456 [1558990453]

Language:

English

Call no.:

M23500/157

Type:

Conference Proceedings

Details

TDL ID:	ZA00015641
Series ID:	PA00000011
Conf. info. (Name):	Symposium on beam-solid interactions
Conf. info. (Number):	1989
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1989.11.27-1989.12.01

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