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PREPARATION AND CHARACTERIZATION OF ION BEAM ASSISTED ALUMINUM OXIDE FILMS

Author(s):
Hirvonen, James K.
Tetreault, T.G.
Parker, G.
Revesz, P.
Land, D.
Price, J.
Simons, D.
Stern, S.
3 more
Publication title:
Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
157
Pub. Year:
1990
Page(from):
13
Page(to):
18
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990456 [1558990453]
Language:
English
Call no.:
M23500/157
Type:
Conference Proceedings

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