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* PLASMA-ASSISTED CHEMICAL VAPOR DEPOSITION OF CERAMIC FILMS AND COATINGS

Author(s):
Davis, R. F.  
Publication title:
Processing science of advanced ceramics : symposium held April 27-28, 1989, San Diego, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
155
Pub. Year:
1989
Page(from):
213
Page(to):
226
Pages:
14
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990289 [1558990283]
Language:
English
Call no.:
M23500/155
Type:
Conference Proceedings

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