Blank Cover Image

LOW TEMPERATURE CRYSTALLIZATION OF AMORPHOUS SILICON FILMS USING AN EXCIMER LASER

Author(s):
Ready, S. E.
Boyce, J. B.
Bachrach, R. Z.
Johnson, R. I.
Winer, K.
Anderson, G.
Tsai, C. C.
2 more
Publication title:
Amorphous silicon technology, 1989 : symposium held April 25-28, 1989, San Diego, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
149
Pub. Year:
1989
Page(from):
345
Page(to):
350
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990227 [1558990224]
Language:
English
Call no.:
M23500/149
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings EXCIMER LASER INDUCED CRYSTALLIZATION OF AMORPHOUS SILICON NEAR THRESHOLD

Bachrach, R.Z., Winer, K., Boyce, J.B., Ponce, F.A., Ready, S.E., Johnson, R., Anderson, G.B.

Materials Research Society
7 Conference Proceedings FAST-PULSE EXCIMER-LASER-INDUCED PROCESSS IN a-Si:H

Winer, K., Bachrach, R.Z., Johnson, R.I., Ready, S.E., Anderson, G.B., Boyce, J.B.

Materials Research Society
2 Conference Proceedings EXCIMER LASER CRYSTALLIZED AMORPHOUS SILICON FILMS: EFFECTS OF SHOT DENSITY AND SUBSTRATE TEMPERATURE

Johnson, R.I., Anderson, G.B., Ready, S.E., Boyce, J.B.

Materials Research Society
8 Conference Proceedings PULSE-TO-PULSE LASER STABILITY EFFECTS ON MULTIPLE SHOT EXCIMER LASER CRYSTALLIZED a-Si THIN FILMS

Johnson, R. I., Anderson, G. B., Boyce, J. B., Fork, D. K., Mei, P., Ready, S. E.

MRS - Materials Research Society
3 Conference Proceedings Large grain creation and destruction in excimer laser crystallized amorphous silicon

Boyce, J. B., Anderson, G. B., Fork, D. K., Johnson, R. I., Mei, P., Ready, S. E.

MRS - Materials Research Society
9 Conference Proceedings CRITICAL LASER FLUENCE OBSERVED IN (111) TEXTURE, GRAIN SIZE AND MOBILITY OF LASER CRYSTALLIZED AMORPHOUS SILICON

Johnson, R.I., Anderson, G.B., Boyce, J.B., Fork, D.K., Mei, P., Ready, S.E., Chen, S.

Materials Research Society
4 Conference Proceedings CHARACTERIZATION OF THE SUBSTRATE INTERFACE OF EXCIMER LASER CRYSTALLIZED POLYCRYSTALLINE SILICON THIN FILMS

Anderson, G. B., Boyce, J. B., Fork, D. K., Johnson, R. I., Mei, P., Ready, S. E.

MRS - Materials Research Society
10 Conference Proceedings CRYSTALLIZATION KINETICS OF HYDROGENATED AMORPHOUS SILICON DURING PULSED EXCIMER LASER ANNEALING

Ready, SE., Roh, J.H., Boyce, J.B., Anderson, G.B.

Materials Research Society
5 Conference Proceedings PULSED LASER CRYSTALLIZATION OF AMORPHOUS SILICON FILMS: EFFECTS OF SUBSTRATE TEMPERATURE AND LASER SHOT DENSITY

Johnson, R.I., Anderson, G.B., Ready, S.E., Fork, D.K., Boyce, J.B.

Materials Research Society
11 Conference Proceedings Laser Crystallized Polysilicon Thin Films and Applications

Boyce, J. B., Mei, P., Fork, D. K., Anderson, G. B., Johnson, R. I.

MRS - Materials Research Society
6 Conference Proceedings LASER DOPING AND CRYSTALLIZATION OF AMORPHOUS SILICON THIN FILMS

Boyce, J. B., Anderson, G. B., Carey, P. G., Fork, D. K., Johnson, R. I., Mei, P., Ready, S. E., Smith, P. M.

MRS - Materials Research Society
12 Conference Proceedings LASER DEHYDROGENATION OF PECVD AMORPHOUS SILICON

Mei, P., Boyce, J.B., Hack, M., Lujan, R.A., Johnson, R.I., Anderson, G.B., Fork, D.K., Ready, S.E., Smith, D.L.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12