Blank Cover Image

OXYGENATED AND FLOURINATED AMORPHOUS SILICON NITRIDE FILMS AND THEIR USE IN THIN FILM TRANSISTORS

Author(s):
Publication title:
Amorphous silicon technology, 1989 : symposium held April 25-28, 1989, San Diego, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
149
Pub. Year:
1989
Page(from):
253
Page(to):
258
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990227 [1558990224]
Language:
English
Call no.:
M23500/149
Type:
Conference Proceedings

Similar Items:

Madan,Arun

SPIE - The International Society for Optical Engineering

Schropp, R. E. J., Adachi, K., Imajyo, N., del Cueto, J. A., Bhat, P. K., Madan, A.,

Materials Research Society

Nickel, N.H., Fuhs, W., Mell, H., Beyer, W.

Materials Research Society

Dyson, A. P., Flewitt, A. J., Milne, W. I., Robertson, J.

Materials Research Society

Morrison, Scott, Xi, Jianping, Madan, Arun

MRS - Materials Research Society

Kobayashi, K., Murai, H., Hayama, M., Yamazaki, T.

Materials Research Society

Bhat,K.N., Rao,P.R.S., Anil Kumar Panariya

Narosa Publishing House

Schropp, R. E. I., Feenstra, K. F., Werf, C. H. M. van der, Holleman, J., Meiling, H.

MRS - Materials Research Society

Brockhoff, A. M., Meiling, H., Schropp, R. E. I., Stannowski, B.

Materials Research Society

Schropp, R. E. I., Feenstra, K. F., Werf, C. H. M. van der, Holleman, J., Meiling, H.

MRS - Materials Research Society

Nickel, N., Saleh, R., Fuhs, W., Mell, H.

Materials Research Society

Chen,P.-F., Chen,J.-H., Chen,D.-I., Sung,H.-J., Hwang,J.-W., Lu,I.-M.

SPIE - The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12