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CRYSTALLINITY OF ISOLATED SILICON EPITAXY (ISE) SILICON-ON-INSULATOR LAYERS

Author(s):
Allen, L. T. P.
Zavrachy, P. M.
Vu, D. P.
Batty, M. W.
Henderson, W. R.
Boden T. J.
Bowen, D. K.
Gorden-Smith D.
Thomas, C. R.
Tjahjadi, T.
5 more
Publication title:
Chemistry and defects in semiconductor heterostructures
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
148
Pub. date:
1989
Page(from):
409
Page(to):
414
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990210 [1558990216]
Language:
English
Call no.:
M23500/148
Type:
Conference Proceedings

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