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EFFECTS OF HELIUM ION IMPLANTATION ON THE OPTICAL AND CRYSTAL PROPERTIES OF GaAs

Author(s):
Bowman Jr., R. C.
Adams, P. M.
Knudsen, J. F.
Moss, S. C.
Dafesh, P. A.
Smith, D. D.
Herman, M. H.
Ward, I. d.
3 more
Publication title:
Ion beam processing of advanced electronic materials : symposium held April 25-27, 1989, San Diego, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
147
Pub. Year:
1989
Page(from):
303
Page(to):
308
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990203 [1558990208]
Language:
English
Call no.:
M23500/147
Type:
Conference Proceedings

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