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PLASMA IMMERSION ION IMPLANTATION FOR IMPURITY GETTERING IN SILICON

Author(s):
Wong, H.
Qian, X. Y.
Cheung, N. W.
Lieverman, M. A.
Brown, I. G.
Yu, K. M.
1 more
Publication title:
Ion beam processing of advanced electronic materials : symposium held April 25-27, 1989, San Diego, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
147
Pub. Year:
1989
Page(from):
91
Page(to):
96
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990203 [1558990208]
Language:
English
Call no.:
M23500/147
Type:
Conference Proceedings

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