Blank Cover Image

THE ION IMPLANTED ARSENIC TAIL IN SILICON

Author(s):
Publication title:
Ion beam processing of advanced electronic materials : symposium held April 25-27, 1989, San Diego, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
147
Pub. Year:
1989
Page(from):
73
Page(to):
78
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990203 [1558990208]
Language:
English
Call no.:
M23500/147
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings A STUDY OF THE ION IMPLANTED ARSENIC TAIL IN SILICON

Beck, S. E., Jaccodine, R. J., Filo, A. J., Irwin, R.

Materials Research Society
7 Conference Proceedings Low-energy model for ion implantation of arsenic and boron into (100) single-crystal silicon

Obradovic,B.J., Morris,S.J., Morris,M.F., Tian,S., Wang,G., Beardmore,K., Snell,C., Jackson,J., Baummann,S., Tasch,A.F.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings EFFECT OF RECOIL IMPLANTATION OF OXYGEN ON BORON ENHANCED DIFFUSION IN SILICON

Fanm d., Jaccordine, R. J.

Materials Research Society
8 Conference Proceedings A New Local Electronic Stopping Model for the Monte Carlo Simulation of Arsenic Ion Implantation into (100) Single-Crystal Silicon

Yang, S.-H., Morris, S., Tian, S., Parab, K., Tasch, A. F., Echenique, P. M., Capaz, R., Joannopoulos, J.

MRS - Materials Research Society
3 Conference Proceedings COUPLED DIFFUSION OF ION-IMPLANTED ARSENIC IN SILICON DIOXIDE

Lee, S.-Tong, lavine, J. P., Fellinger, P. R.

Materials Research Society
9 Conference Proceedings Preparation and Characterization of Silicon Nanostructures Obtained by Ion Implantation

Mestanza, S. N. M., Dias, G. O., Queiroz, J. E. C., Doi, I., Swart, J. W., Rodriguez, E., Neves, A. A. R., Martinho, H.

Electrochemical Society
4 Conference Proceedings X-ray Diffuse Scattering Investigation of Defects in Ion-Implanted and Annealed Silicon

Chang, C. H., Beck, U., Metzger, T. H., Patel, J. R.

MRS - Materials Research Society
10 Conference Proceedings DEPENDENCE OF PROFILES OF ARSENIC IMPLANTED INTO SILICON ON TILT AND ROTATION ANGLES

Yang, S., Park, C., Klein, K., Gupta, P., Tasch, A., Simonton, R., Lux, G., McGee, C.

Materials Research Society
5 Conference Proceedings MEGAVOLT BORON AND ARSENIC IMPLANTATION INTO SILICON

Bryne, P. F., Cheung, N. W., Tam, S., Hu, C., Shih, Y. C., Washburn, J., Starthman, M.

North-Holland
11 Conference Proceedings STRUCTURAL CHANGES DURING TRANSIENT POST-ANNEALING OF PREANNEALED AND ARSENIC IMPLANTED POLYCRYSTALLINE SILICON FILMS

Krause, S.J., Wilson, S.R., Gregory, R.B., Paulson, W.M., Leavitt, J.A., McIntyre Jr., L.C., Seerveld, J.L., Stoss, P.

Materials Research Society
6 Conference Proceedings Athermal Annealing of Silicon Implanted with Phosphorus and Arsenic

Grun, J., Fischer, R.P., Peckerar, M., Felix, C.L., Covington, B.C., Donnelly, D.W., Boro Djordjevic, B., Mignogna, R., …

Electrochemical Society
12 Conference Proceedings The Role of Vacancies and Interstitials in Transient-Enhanced Diffusion of Arsenic Implanted Into Silicon

Venables, D., Krishnamoorthy, V., Gossmann, H-J., Lilak, A., Jones, K. S., Jacobson, D. C.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12