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THIN-FILM ENCAPSULANTS FOR THERMAL PROCESSING OF GaAs

Author(s):
Molarius, J. M.
Kolawa, E.
Morishita, K.
Pan, E. T.-S
Tandon, J. L.
Nicolet, M-A.
1 more
Publication title:
Advances in materials, processing, and devices in III-V compound semiconductors
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
144
Pub. date:
1989
Page(from):
525
Page(to):
530
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990173 [1558990178]
Language:
English
Call no.:
M23500/144
Type:
Conference Proceedings

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