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IN-SITU STUDIES OF SILICON OXIDATION

Author(s):
Publication title:
High resolution microscopy of materials : symposium held November 29-December 1, 1988, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
139
Pub. date:
1989
Page(from):
67
Page(to):
74
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990128 [1558990127]
Language:
English
Call no.:
M23500/139
Type:
Conference Proceedings

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