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RBS/CHANNELING AND TEN ANALYSIS OF THIN SANDWICHED EPI-LAYERS OF GERMANIUM ON SILICON

Author(s):
Swanson, M.L.
Parikh, N.P.
Frey, E.C.
Sandhu, G.S.
Chu, W.K.
Baribeau, J.-M.
Song, Kechang
McCaffrey, J.
Jackman, T.E.
4 more
Publication title:
Characterization of the structure and chemistry of defects in materials : symposium held November 28-December 3, 1988, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
138
Pub. Year:
1989
Page(from):
581
Page(to):
586
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990111 [1558990119]
Language:
English
Call no.:
M23500/138
Type:
Conference Proceedings

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