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NEW PRECURSORS FOR THE ORGANOMETALLIC CHEMICAL VAPOR DEPOSITION OF ALUMINUM NITRIDE

Author(s):
Gladfelter, Wayne L.
Boyd, David C.
Hwang, Jen-Wei
Haasch, Richard T.
Evans, John F.
Ho, Kwok-Lun
Jensen, Klavs F.
2 more
Publication title:
Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
131
Pub. Year:
1989
Page(from):
447
Page(to):
452
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990043 [1558990046]
Language:
English
Call no.:
M23500/131
Type:
Conference Proceedings

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