Blank Cover Image

DEPENDENCE OF PECVD SILICON OXYNITRIDE PROPERTIES ON DEPOSITION PARAMETERS

Author(s):
Publication title:
Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
131
Pub. Year:
1989
Page(from):
295
Page(to):
300
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990043 [1558990046]
Language:
English
Call no.:
M23500/131
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Photoluminescence in Silicon-rich PECVD Silicon Oxynitride Alloys

M. Ribeiro, I. Pereyra

Electrochemical Society
7 Conference Proceedings Fabrication and characterization of PECVD-silicon-oxynitride-based waveguides

Alayo, M.I., Criado, D., Carreno, M.N.P., Pereyra, I.

SPIE - The International Society of Optical Engineering
2 Conference Proceedings PIEZORESISTIVE PROPERTIES OF BORON-DOPED PECVD MICRO- AND POLYCRYSTALLINE SILICON FILMS

Berre, M. Le, Lemiti, M., Barbier, D., Pinard, P., Cali, J., Bustarret, E., Bruyere, J. -C., Sicart, J., Robert, J. L.

MRS - Materials Research Society
8 Conference Proceedings Evaluation of the mechanical properties of square membranes prestressed by PECVD silicon oxynitride thin films

Jozwik, M., Gorecki, C., Delobelle, P., Sabac, A., Kujawinska, M.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Influence of Deposition Parameters and Temperature on Stress and Strain of In Situ Doped PECVD Silicon Carbide

Pham, H.T.M., de Boer, C.R., Pakula, L., Sarro, P.M.

Trans Tech Publications
9 Conference Proceedings Properties of Annealed Silicon Oxynitride Layers for Optical Applications

Woerhoff, K., Hussein, G.M., Roeloffzen, C.G.H., Hildennk, L.T.H.

Electrochemical Society
4 Conference Proceedings Influence of Deposition Parameters and Temperature on Stress and Strain of In Situ Doped PECVD Silicon Carbide

Pham, H.T.M., de Boer, C.R., Pakula, L., Sarro, P.M.

Trans Tech Publications
10 Conference Proceedings PROPERTIES OF SILICON OXYNITRIDE AND ALUMINUM OXYNITRIDE COATINGS DEPOSITED USING ION ASSISTED DEPOSITION

Al-Jumaily, G.A., Mooney, T.A., Spurgeon, W.A., Dauplaise, H.M.

Materials Research Society
5 Conference Proceedings Silicon Oxynitride ECR-PECVD Films for Integrated Optics

Pernas, P. L., Ruiz, E., Garrido, J., Piqueras, J., Paszti, F., Climent-Font, A., Lifante, G., Cantelar, E.

Trans Tech Publications
11 Conference Proceedings Deposition, Material And Optical Properties Of UV-Transmissive PECVD Silicon Nitride Films

Ibok, E., Santana, M., Garg, S.

Electrochemical Society
6 Conference Proceedings Deposition and characterization of PECVD phosphorus doped silicon oxynitride layers for integrated optics applications

Hussein, M. G., Worhoff, K., Sengo, G., Driessen, A.

Electrochemical Society
12 Conference Proceedings The Effects of the Deposition Conditions on the Composition and Properties of PECVD Silicon Dioxide Films

Ceiler, M.F., Jr., Kohl, P.A., Bidstrup, S.A., May, G.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12