Blank Cover Image

AMORPOUS TO CRYSTALLINE STRUCTURE TRANSITION DURING GROWTH OF SILICON BY PLASMA ENHANCE CHEMICAL VAPOR DEPOSITION

Author(s):
Publication title:
Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
131
Pub. Year:
1989
Page(from):
269
Page(to):
275
Pages:
7
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990043 [1558990046]
Language:
English
Call no.:
M23500/131
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Growth of Er doped Si films by electron cyclotron resonance plasma enhanced chemical vapor deposition

Rogers, Jim L., Varhue, Walter J., Adams, Edward

MRS - Materials Research Society
7 Conference Proceedings Scanning Tunneling Microscopy Study of the Growth Mechanism for Hydrogenated Amorphous Silicon Produced by Plasma Enhanced Chemical Vapor Deposition

Flewitt, A. J., Milne, W. I., Robertson, J., Stephenson, A. W., Welland, M. E.

MRS - Materials Research Society
2 Conference Proceedings GROWTH OF Ge-ON-Si STRUCTURES USING REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

Qian, Rong Z., Kinosky, D., Mahajan, A., Thomas, S., Fretwell, J., Munguia, P., Banerjee, S., Tasch, A.

Materials Research Society
8 Conference Proceedings STUDIES OF SiH2Cl2/H2 GAS PHASE CHEMISTRY FOR SELECTIVE THIN FILM GROWTH OF CRYSTALLINE SILICON, c-Si, USING REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION

Theil, J.A., Lucovsky, G., Hattangady, S.V., Fountain, G.G., Markunas, R.J.

Materials Research Society
3 Conference Proceedings Effect of growth parameters on refractive index and film composition of plasma enhanced chemical vapor deposition silicon oxynitride films

Naskar, S., Bower, C. A., Yadon, L. N., Wolter, S. D., Stoner, B. R., Glass, J. T.

Materials Research Society
9 Conference Proceedings Synthesis of Carbon Nanotubes by Plasma-Enhanced Chemical Vapor Deposition

Moshkalyov, S.A., Reyes-Betanzo, C., Swart, J.W., Ramos, A.C.S.

Electrochemical Society
4 Conference Proceedings GROWTH AND HIGH RESOLUTION TEM CHARACTERIZATION OF Ge Si1-x/Si HETERO-STRUCTURES BY REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION

Qian, R., Chung, I., Kinosky, D., Hsu, T., Irby, J., Mahajan, A., Thomas, S., Banerjee, S., Tasch, A., Rabenberg, L., …

Materials Research Society
10 Conference Proceedings Monitoring the Growth of Microcrystalline Silicon Deposited by Plasma-enhanced Chemical Vapor Deposition Using In-situ Raman Spectroscopy

S. Muthmann, F. Köhler, M. Hülsbeck, M. Meier, A. Mück, R. Schmitz, W. Appenzeller, R. Carius, A. Gordijn

Materials Research Society
5 Conference Proceedings GROWTH AND HIGH RESOLUTION TEM CHARACTERIZATION OF GexSi1-x/Si HETERO-STRUCTURES BY REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

Qian, R., Chung, I., Kinosky, D., Hsu, T., Irby, J., Mahajan, A., Thomas, S., Banerjee, S., Tasch, A., Rabenberg, L., …

Materials Research Society
11 Conference Proceedings DEPOSITION OF GaN BY REMOTE PLASMA-ENHANCED CHEMICAL-VAPOR DEPOSITION (Remote PECVD)

Choi, S.W., Bachmann, K.J., Lucovsky, G.

Materials Research Society
6 Conference Proceedings Polymorphous Silicon Nanowires Synthesized by Plasma-Enhanced Chemical Vapor Deposition

Zeng, X.B., Liao, X.B., Diao, H.W., Hu, Z.H., Xu, Y.Y., Zhang, S.B., Chen, C.Y., Chen, W.D., Kong, G.L.

Materials Research Society
12 Conference Proceedings Laser Doping and Recrystallization for Amorphous Silicon Films by Plasma-Enhanced Chemical Vapor Deposition

Wuu, D. S., Lien, S. Y., Wang, J. H., Mao, H. Y., Hsieh, I. C., Wu, B. R., Yao, P. C.

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12