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VISCOELASTIC STRESS RELIEF IN PATTERNED SILICON-ON-INSULAR STRUCTURES

Author(s):
Publication title:
Thin films : stresses and mechanical properties : symposium held November 28-30, 1988, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
130
Pub. Year:
1989
Page(from):
327
Page(to):
332
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990036 [1558990038]
Language:
English
Call no.:
M23500/130
Type:
Conference Proceedings

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