Blank Cover Image

VISCOELASTIC STRESS RELIEF IN PATTERNED SILICON-ON-INSULAR STRUCTURES

Author(s):
Publication title:
Thin films : stresses and mechanical properties : symposium held November 28-30, 1988, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
130
Pub. date:
1989
Page(from):
327
Page(to):
332
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990036 [1558990038]
Language:
English
Call no.:
M23500/130
Type:
Conference Proceedings

Similar Items:

Letavic, T. J., Maby, E. W., Gutmann, R. J., Petruzzello, J.

Materials Research Society

Beinvogl W., Gutmann A.

Plenum Press

Letavic, T. J., Malby, E. W., Gutmann, R. J.

Materials Research Society

Zhang, Y. B., Chen, S. W., Liu, C. J., Sun, Y. H., Sun, M. C., Wang, R. K.

Trans Tech Publications

Lee, Byung-Chan, Duquette, David J., Gutmann, Ronald J.

Materials Research Society

Gutmann, Ronald J., Wang, Bin, Lee, Byung-Chan, Paul Chow, T., Duquette, David J.

Electrochemical Society

Ronald J. Gutmann, J. Jay McMahon, Jian-Qiang Lu

Materials Research Society

Zukoski, C.F., Goodwin, J.W., Hughes, R.W., Partridge, S.J.

Materials Research Society

Chuang, Tien-Min, Rose, Kenneth, Gutmann, Ronald J.

Materials Research Society

S.S. Iyer, P.M. Pitner, M.J. Tejwani, T.O. Sedgwick

Electrochemical Society

Baumgart, H., Letavic, T.J., Wolf, I.De., Tsou, L., Maes, H.E., Egloff, R.

Electrochemical Society

Ohl, R.G., Barthelmy, M.P., Zewari, S.W., Toland, R.W., McMann, J.C., Puckett, D.F., Hagopian, J.G., Hylan, J.E., …

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12