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THERMAL STAIN MEASUREMENTS IN EPITAXIAL CoSi2/Si BY DOUBLE CRYSTAL X-RAY DIFFRACTION

Author(s):
Bai, Gang
Nicolet, Marc.-A.
Vreeland, Jr. Thad
Ye, Q.
Kao, Y.C.
Wang, K.L.
1 more
Publication title:
Thin films : stresses and mechanical properties : symposium held November 28-30, 1988, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
130
Pub. Year:
1989
Page(from):
35
Page(to):
40
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990036 [1558990038]
Language:
English
Call no.:
M23500/130
Type:
Conference Proceedings

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