THE MICROSTRUCTURE OF GOLD FILMS WRITTEN BY FOCUSED ION BEAM INDUCED DEPOSITION

THE MICROSTRUCTURE OF GOLD FILMS WRITTEN BY FOCUSED ION BEAM INDUCED DEPOSITION

Author(s):

Publication title:

Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

129

Pub. Year:

1989

Page(from):

483

Page(to):

488

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990029 [155899002X]

Language:

English

Call no.:

M23500/129

Type:

Conference Proceedings

Details

TDL ID:	ZA00015614
Series ID:	PA00000011
Conf. info. (Name):	Symposium on laser and particle-beam chemical processes on surfaces
Conf. info. (Number):	1988
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1988.11.29-1988.12.02

Similar Items:

1 Conference Proceedings MICROSTRUCTURE OF GOLD FILMS GROWN BY ION INDUCED DEPOSITION Ro, J. S., Dubner, A. D., Thompson, C. V., Melngailis, J. Materials Research Society	7 Conference Proceedings CHANGING SEGREGATION COEFFICIENTS DURING ION BEAM INDUCED EPITAXY OF AMORPHOUS Si Custer, J.S., Thompson, Michael O., Jacobson, D.C., Poate, J.M. Materials Research Society
2 Conference Proceedings *FOCUSED ION BEAM INDUCED DEPOSITION Melngailis, John, Blauner, Patricia G. Materials Research Society	8 Conference Proceedings CHANGING SEGREGATION COEFFICIENTS DURING ION BEAM INDUCED EPITAXY OF AMORPHOUS Si Custer, J.S., Thompson, Michael O., Jacobson, D.C., Poate, J.M. Materials Research Society
3 Conference Proceedings Focused Ion Beam Induced Deposition Melngailis J., Dubner D. A., Ro S. J., Shedd M. G., Lezec H. Martinus Nijihoff Publishers	9 Conference Proceedings Focused Ion Beam Etching of GaN Flierl, C., White, I. H., Kuball, M., Heard, P. J., Allen, G. C., Marinelli, C., Rorison, J. M., Penty, R. V., Chen, Y., … MRS - Materials Research Society
4 Conference Proceedings Focused Ion Beam Metrology Wagner, A., Blauner, P., Longo, P., Cohen, S. MRS - Materials Research Society	10 Conference Proceedings Focused Electron Beam Induced Deposition of Gold and Rhodium Hoffmann, P., Utke, I., Cicoira, F., Dwir, B., Leifer, K., Kapon, E., Doppelt, P. Materials Research Society
5 Conference Proceedings NUMERICAL MODELING OF ENERGY-BEAM INDUCED LOCALIZED MELTING OF THIN Si FILMS Im, J.S., Lipman, J.D., Miaoulis, I.N., Chen, C.K., Thompson, C.V. Materials Research Society	11 Conference Proceedings *KINETICS, MICROSTRUCTURE AND MECHANISMS OF ION BEAM-INDUCED EPITAXIAL CRYSTALLIZATION OF SEMICONDUCTORS Elliman, R.G., Williams, J.S., Maher, D.M., Brown, W.L. Materials Research Society
6 Conference Proceedings MATERIALS ISSUES IN X-RAY MASK REPAIR BY FOCUSED ION BEAMS Melngailis, John MRS - Materials Research Society	12 Conference Proceedings SEGREGATION OF Ag AND Cu DURING ION BEAM AND THERMALLY INDUCED RECRYSTALLIZATION OF AMORPHOUS SI Custer, J.S., Thompson, Michael O., Poate, J.M. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12