ULTRAVIOLET LASER ABLATION OF A SILICON WAFER

ULTRAVIOLET LASER ABLATION OF A SILICON WAFER

Author(s):

Publication title:

Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

129

Pub. Year:

1989

Page(from):

371

Page(to):

374

Pages:

4

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990029 [155899002X]

Language:

English

Call no.:

M23500/129

Type:

Conference Proceedings

Details

TDL ID:	ZA00015614
Series ID:	PA00000011
Conf. info. (Name):	Symposium on laser and particle-beam chemical processes on surfaces
Conf. info. (Number):	1988
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1988.11.29-1988.12.02

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