A1 PHOTODEPOSITION AND LIGHT-INDUCED NUCLEATION ON p-TYPE Si FROM TMA

A1 PHOTODEPOSITION AND LIGHT-INDUCED NUCLEATION ON p-TYPE Si FROM TMA

Author(s):

Publication title:

Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

129

Pub. Year:

1989

Page(from):

251

Page(to):

258

Pages:

8

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990029 [155899002X]

Language:

English

Call no.:

M23500/129

Type:

Conference Proceedings

Details

TDL ID:	ZA00015614
Series ID:	PA00000011
Conf. info. (Name):	Symposium on laser and particle-beam chemical processes on surfaces
Conf. info. (Number):	1988
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1988.11.29-1988.12.02

Similar Items:

1 Conference Proceedings LIMITING STEPS AT LOW TEMPERATURE IN DIRECT WRITING OF Al ON Si FROM TMA Flicstein, J., Bouree, J. E., Bresse, J. F., Pougnet, A. M. Materials Research Society	7 Conference Proceedings Nitrogen doping and p-type conductivity of ZnO films grown by vapor phase epitaxy Rommeluere, J.F., Svob, L., Mimila-Arroyo, J., Hassani, S., Jomard, F., Amiri, G., Lusson, A., Sallet, V., Galtier, P., … SPIE - The International Society of Optical Engineering
2 Conference Proceedings UV Light-Assisted Deposition of Al on Si from TMA Bouree E. J., Flicstein J. Martinus Nijihoff Publishers	8 Conference Proceedings Growth and Electrical Properties of ZnO Grown by Closed Space Vapor Transport on Sapphire Substrates Mimila-Arroyo, J., Rommeluere, J.F., Barbe, M., Jomard, F., Tromson-Carli, A., Gorochov, O., Marfaing, Y., Galtier, P. Materials Research Society
3 Conference Proceedings ROOM TEMPERATURE UV LASER CONTINUOUS DIRECT WRITING OF Al FROM TMA Bouree, J. E., Flicstein, J. Materials Research Society	9 Conference Proceedings Modeling and Monte Carlo simulation of nucleation and growth of UV/low-temperatureinduced nanostructures Flicstein,J., Pata,S., Chun,L.S.H.K., Palmier,J.F., Courant,J.L. SPIE-The International Society for Optical Engineering
4 Conference Proceedings DIRECT WRITING OF A1 ON Si BY UV EXPOSURE PRIOR TO LASER-ASSISTED CVD Bouree, J.E., Flicstein, J., Nissim, Y.I. Materials Research Society	10 Conference Proceedings LASER-INDUCED PHOTODEPOSITION OF Fe FILMS FROM IRON CARBONYL Love, P. J., Loda, R. T., LaRoe, P. R., Green, A. K. North-Holland
5 Conference Proceedings Photonucleation and Photodeposition of Al on Si from Flowing Trimethylaluminium in Hydrogen Bourree E. J., Flicstein J. Plenum Press	11 Conference Proceedings Two Types of Phase Separation and Crystal Nucleation-Growth Mechanisms for Machinable Glass Ceramic X.P. Ma, G.X. Li, J.F. Yang, Z.H. Jin Trans Tech Publications
6 Conference Proceedings Optical properties and modeling of flash VUV-induced silicon oxynitride isotropic deposition that is water and hydroxyl free Flicstein,J., Mba,J., Solliec,J.-M.Le, Palmier,J.F. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Nanoscale simulation of indium phosphide epitaxy by molecular beam Flicstein,J., Maisonneuve,D., Guillonneau,E., Palmier,J.F., Harmand,J.C., Barthe,F., Moison,J.M. SPIE - The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12